TY  - JOUR
AU  - V. Lee
AU  - Eric Lin
AU  - Haonan Wang
AU  - Wen-Li Wu
AU  - W Chen
AU  - T Deis
AU  - E Moyer
C2  - Chemistry of Materials
DA  - 2002-04-01 00:04:00
LA  - en
M1  - 14
PB  - Chemistry of Materials
PY  - 2002
TI  - Structural Comparison of Hydrogen Silsesquioxane Based Porous Low-k Thin Films Prepared With Varying Process Conditions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851949
ER  -