@article{803776,
  author = {V. Lee and Eric Lin and Haonan Wang and Wen-Li Wu and W Chen and T Deis and E Moyer},
  title = {Structural Comparison of Hydrogen Silsesquioxane Based Porous Low-k Thin Films Prepared With Varying Process Conditions},
  year = {2002},
  number = {14},
  month = {2002-04-01 00:04:00},
  publisher = {Chemistry of Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851949},
  language = {en},
}