Surface finish is important to the function of a wide range of industrial components including highways, ship hulls and propellers, mechanical parts, semiconductors, and optics. Hence, many documentary standards have been developed for specifying surface texture, and a wide range of techniques may be used for measuring surface texture. We will review these techniques and suggest a classification scheme for them, emphasizing the differences between profiling, area profiling, and area averaging methods. We will then focus on the techniques of stylus profiling, interferometric microscopy, and atomic force microscopy and discuss their relative strengths and weaknesses, in particular with respect to the issues of how smooth a surface texture can be measured and how fine a surface texture in the lateral direction can be measured with each technique. Related to smooth surface measurements, we will review recent efforts to develop silicon single atom step heights as z-calibration standards for atomic force microscopes.
Proceedings Title: IMEKO, International Measurement Confederation, TC14 - Measurement of Geometrical Quantities, 7th Symposium on Surface Metrology for Quality Assurance - ISMQC
Conference Dates: September 24-26, 2001
Conference Location: Cairo, -1
Pub Type: Conferences
area averaging methods, area profiling, atomic force microscopy, interferometric microscopy, profiling, stylus profiling, surface finish, surface metrology, surface texture