Slifka, A.
, Panchawagh, H.
, Mahajan, R.
, Finch, D.
and Rorrer, R.
(2004),
Static and Quasi-static Calibration of Bio-MEMS Device, Annual Rocky Mountain Bioengineering Symposium|41st|Biomedical Sciences Instrumentation|Instrument Society of America
(Accessed April 19, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Static and Quasi-static Calibration of Bio-MEMS Device
Published
Author(s)
, Hrishikesh V. Panchawagh, Roop L. Mahajan, , R. A. Rorrer
Abstract
A bio-MEMS device which has been designed to stimulate cells by oscillatory actuation in the vertical direction has been calibrated. The displacement of this device was determined experimentally by a laser interferometer when actuated by a static voltage and by an atomic force microscope when actuated quasi-statically at 0.1 Hz. Both experimental calibrations were compared to a simple model.Proceedings Title
Annual Rocky Mountain Bioengineering Symposium|41st|Biomedical Sciences Instrumentation|Instrument Society of America
Volume
40
Conference Dates
April 1, 2004
Conference Title
Proceedings of the Rocky Mountain Bioengineering Symposium
Pub Type
Conferences
Keywords
AFM, bio-MEMS, calibration, MEMS, MEMS model
Citation
Created October 1, 2004, Updated February 17, 2017