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Static and Quasi-static Calibration of Bio-MEMS Device

Published

Author(s)

Andrew J. Slifka, Hrishikesh V. Panchawagh, Roop L. Mahajan, Dudley Finch, R. A. Rorrer

Abstract

A bio-MEMS device which has been designed to stimulate cells by oscillatory actuation in the vertical direction has been calibrated. The displacement of this device was determined experimentally by a laser interferometer when actuated by a static voltage and by an atomic force microscope when actuated quasi-statically at 0.1 Hz. Both experimental calibrations were compared to a simple model.
Proceedings Title
Annual Rocky Mountain Bioengineering Symposium|41st|Biomedical Sciences Instrumentation|Instrument Society of America
Volume
40
Conference Dates
April 1, 2004
Conference Title
Proceedings of the Rocky Mountain Bioengineering Symposium

Keywords

AFM, bio-MEMS, calibration, MEMS, MEMS model

Citation

Slifka, A. , Panchawagh, H. , Mahajan, R. , Finch, D. and Rorrer, R. (2004), Static and Quasi-static Calibration of Bio-MEMS Device, Annual Rocky Mountain Bioengineering Symposium|41st|Biomedical Sciences Instrumentation|Instrument Society of America (Accessed April 23, 2024)
Created October 1, 2004, Updated February 17, 2017