@conference{163076, author = {Andrew Slifka and Hrishikesh Panchawagh and Roop Mahajan and Dudley Finch and R. Rorrer}, title = {Static and Quasi-static Calibration of Bio-MEMS Device}, year = {2004}, number = {40}, month = {2004-10-01}, publisher = {Annual Rocky Mountain Bioengineering Symposium|41st|Biomedical Sciences Instrumentation|Instrument Society of America}, language = {en}, }