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A Standards-based Approach to Dopant Quantification Using Atom Probe Tomography

Published

Author(s)

Karen DeRocher, Mark McLean, Frederick Meisenkothen
Proceedings Title
Microscopy and Microanalysis
Volume
28
Conference Dates
July 31-August 4, 2022
Conference Location
Portland, OR, US

Citation

DeRocher, K. , McLean, M. and Meisenkothen, F. (2022), A Standards-based Approach to Dopant Quantification Using Atom Probe Tomography, Microscopy and Microanalysis , Portland, OR, US, [online], https://doi.org/10.1017/S1431927622003373, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934367 (Accessed February 24, 2024)
Created July 22, 2022, Updated February 17, 2023