@conference{929056,
  author = {Karen DeRocher and Mark McLean and Frederick Meisenkothen},
  title = {A Standards-based Approach to Dopant Quantification Using Atom Probe Tomography},
  year = {2022},
  number = {28},
  month = {2022-07-22 04:07:00},
  publisher = {Microscopy and Microanalysis , Portland, OR, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934367},
  doi = {https://doi.org/10.1017/S1431927622003373},
  language = {en},
}