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Standard Reference material ::the certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe maesurements, 2006 edition

Published

Author(s)

James R Ehrstein, M Carroll Croarkin, Hung Kung Liu
Citation
- NIST SP 260-131e2006
Report Number
NIST SP 260-131e2006

Citation

Ehrstein, J. , Croarkin, M. and Liu, H. (2006), Standard Reference material ::the certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe maesurements, 2006 edition, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-131e2006 (Accessed May 29, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2006, Updated May 20, 2023