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Specimen-thickness effects on transmission Kikuchi patterns in the scanning electron microscope

Published

Author(s)

Katherine P. Rice, Robert R. Keller, Mark Stoykovich

Abstract

We report the effects of varying specimen thickness onthe generation of transmission Kikuchi patterns in the scanning electron microscope. Diffraction patterns sufficient for automated indexing were observed from films spanning nearly three orders of magnitude in thickness in several materials, from 5nm of hafnium dioxide to 3 μm of aluminum, corresponding to a mass-thickness range of 5 to 810 μg cm–2. The scattering events that are most likely to be detected in transmission are shown to be very near the exit surface of the films. The energies, spatial distribution and trajectories of the electrons that are transmitted through the film and are collected by the detector are predicted using Monte Carlo simulations.
Citation
Journal of Microscopy
Volume
254
Issue
3

Keywords

t-EBSD, scanning electron microscopy, diffraction, semiconductors, thin films

Citation

Rice, K. , Keller, R. and Stoykovich, M. (2014), Specimen-thickness effects on transmission Kikuchi patterns in the scanning electron microscope, Journal of Microscopy, [online], https://doi.org/10.1111/jmi.12124 (Accessed April 16, 2024)
Created March 24, 2014, Updated November 10, 2018