Jamba, D.
(1977),
Some aspects of dose measurement for accurate ion implantation:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-39
(Accessed October 7, 2024)
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Some aspects of dose measurement for accurate ion implantation:
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- NBS SP 400-39
Report Number
NBS SP 400-39
Pub Type
NIST Pubs
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Created January 1, 1977, Updated May 19, 2023