@misc{1161846,
  author = {Douglas M Jamba},
  title = {Some aspects of dose measurement for accurate ion implantation:},
  year = {1977},
  month = {1977-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-39},
  language = {en},
}