Lan, K.
, Yen, J.
and Kramar, J.
(2004),
Sliding Mode Control for Active Vibration Isolation of a Long Range Scanning Tunneling Microscope, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822380
(Accessed December 14, 2024)
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Sliding Mode Control for Active Vibration Isolation of a Long Range Scanning Tunneling Microscope
Published
Author(s)
K J. Lan, ,
Abstract
An active vibration isolation (AVI) system has been designed and implemented for the Molecular Measuring Machine (M3) at the National Institute of Standards and Technology (NIST). NIST is investigating active vibration isolation as an approach to improving the M3 image resolution and measurement speed. This article presents the full dynamic model of the AVI system with the Mallock suspension used for the M3 system suspension. A decoupling process is employed to decompose the complicate dynamics into separate axis. This article then applied a sliding mode controller (SMC) to overcome the system nonlinearities. Experimental results show that the controller is effective, achieving a vibration attenuation of 10 dB at some frequencies, depending on the axis.Citation
Review of Scientific Instruments
Volume
75(11)
Pub Type
Journals
Download Paper
Keywords
Mallock suspension, scanning probe microscope, sliding mode control, vibration isolation
Citation
Issues
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Created October 28, 2004, Updated October 12, 2021