Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Sliding Mode Control for Active Vibration Isolation of a Long Range Scanning Tunneling Microscope



K J. Lan, James H. Yen, John A. Kramar


An active vibration isolation (AVI) system has been designed and implemented for the Molecular Measuring Machine (M3) at the National Institute of Standards and Technology (NIST). NIST is investigating active vibration isolation as an approach to improving the M3 image resolution and measurement speed. This article presents the full dynamic model of the AVI system with the Mallock suspension used for the M3 system suspension. A decoupling process is employed to decompose the complicate dynamics into separate axis. This article then applied a sliding mode controller (SMC) to overcome the system nonlinearities. Experimental results show that the controller is effective, achieving a vibration attenuation of 10 dB at some frequencies, depending on the axis.
Review of Scientific Instruments


Mallock suspension, scanning probe microscope, sliding mode control, vibration isolation


Lan, K. , Yen, J. and Kramar, J. (2004), Sliding Mode Control for Active Vibration Isolation of a Long Range Scanning Tunneling Microscope, Review of Scientific Instruments, [online], (Accessed July 20, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created October 28, 2004, Updated October 12, 2021