TY - JOUR AU - K Lan AU - James Yen AU - John Kramar C2 - Review of Scientific Instruments DA - 2004-10-29 00:10:00 LA - en M1 - 75(11) PB - Review of Scientific Instruments PY - 2004 TI - Sliding Mode Control for Active Vibration Isolation of a Long Range Scanning Tunneling Microscope UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822380 ER -