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In situ observations of Berkovich indentation induced phase transitions in crystalline silicon films
Published
Author(s)
Yvonne B. Gerbig, Chris A. Michaels, Robert F. Cook
Abstract
The pressure induced phase transitions of crystalline Si films was studied in situ under a Berkovich probe using the Raman spectroscopy-enhanced instrumented indentation technique. The observations suggested strain and time as important parameters in the nucleation and growth of high-pressure phases and, in contrast to earlier reports, indicate that pressure release is not a precondition for transformation to high pressure phases.
Gerbig, Y.
, Michaels, C.
and Cook, R.
(2016),
In situ observations of Berkovich indentation induced phase transitions in crystalline silicon films, Scripta Materialia, [online], https://doi.org/10.1016/j.scriptamat.2016.04.007
(Accessed October 20, 2025)