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Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches

Published

Author(s)

Sang-Mo Koo, Qiliang Li, Monica D. Edelstein, Curt A. Richter, Eric M. Vogel
Conference Dates
December 7-9, 2005
Conference Location
Bethesda, MD, USA
Conference Title
2005 International Semiconductor Device Research Symposium

Citation

Koo, S. , Li, Q. , Edelstein, M. , Richter, C. and Vogel, E. (2005), Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches, 2005 International Semiconductor Device Research Symposium, Bethesda, MD, USA (Accessed June 25, 2024)

Issues

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Created December 8, 2005, Updated October 12, 2021