@conference{760051,
  author = {Sang-Mo Koo and Qiliang Li and Monica Edelstein and Curt Richter and Eric Vogel},
  title = {Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches},
  year = {2005},
  month = {2005-12-09 00:12:00},
  publisher = {2005 International Semiconductor Device Research Symposium, Bethesda, MD, USA},
  language = {en},
}