TY - CONF AU - Sang-Mo Koo AU - Qiliang Li AU - Monica Edelstein AU - Curt Richter AU - Eric Vogel C2 - 2005 International Semiconductor Device Research Symposium, Bethesda, MD, USA DA - 2005-12-09 00:12:00 LA - en PB - 2005 International Semiconductor Device Research Symposium, Bethesda, MD, USA PY - 2005 TI - Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches ER -