Leone, S.
, Campos, F.
and Weaver, G.
(1994),
Silicon etching by kinetic-energy-enhanced chlorine, Proc 16th Symposium on Dry Processes Institute of Electrical Engineers of Japan (Accessed September 16, 2026)
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Silicon etching by kinetic-energy-enhanced chlorine
Published
Author(s)
, F X. Campos, G C. Weaver
Citation
Proc 16th Symposium on Dry Processes Institute of Electrical Engineers of Japan
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Others
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Created January 1, 1994, Updated February 17, 2017