TY - VIDEO AU - S Leone AU - F Campos AU - G Weaver C2 - Proc 16th Symposium on Dry Processes Institute of Electrical Engineers of Japan DA - 1994-01-01 LA - en PB - Proc 16th Symposium on Dry Processes Institute of Electrical Engineers of Japan PY - 1994 TI - Silicon etching by kinetic-energy-enhanced chlorine ER -