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PUBLICATIONS

Semiconductor Metrology Programs at NIST

Published

Author(s)

Joaquin (. Martinez, Stephen Knight

Abstract

The history of the National Bureau of Standards/National Institute of Standards and Technology (NBS/NIST) will be briefly reviewed emphasizing the creation of the National Semiconductor Metrology Program (NSMP) and the Office of Microelectronics Programs (OMP). The organization of the projects supported by the OMP will be presented, and some of the most recent accomplishments will be described.
Conference Dates
September 15-18, 2004
Conference Location
Manaus, 1, BR
Conference Title
Micro and Nano Technology in PIM 2004
New Industrial Technologies
Pub Type
Conferences

Keywords

NIST, OMP, semiconductors

Citation

Martinez, J. and Knight, S. (2004), Semiconductor Metrology Programs at NIST, Micro and Nano Technology in PIM 2004 New Industrial Technologies, Manaus, 1, BR (Accessed December 2, 2023)

Created September 14, 2004, Updated October 12, 2021