Marchiando, J.
(1991),
Semiconductor Measurement Technology: A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Spectroscopic Models, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed May 2, 2024)
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Semiconductor Measurement Technology: A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Spectroscopic Models
Published
Author(s)
Citation
Special Publication (NIST SP) -
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created April 30, 1991, Updated February 17, 2017