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Semiconductor Measurement Technology: A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Spectroscopic Models

Published

Author(s)

Jay F. Marchiando
Citation
Special Publication (NIST SP) -

Citation

Marchiando, J. (1991), Semiconductor Measurement Technology: A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Spectroscopic Models, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 24, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 30, 1991, Updated February 17, 2017