@misc{199621,
  author = {Jay Marchiando},
  title = {Semiconductor Measurement Technology: A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Spectroscopic Models},
  year = {1991},
  month = {1991-04-30},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}