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Semiconductor Measurement Technology: Database for and Statistical Analysis of the Interlaboratory Determination of the Conversion Coefficient for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption

Published

Author(s)

D. Baghdadi, Robert I. Scace, E. J. Walters
Citation
Special Publication (NIST SP) -
Volume
400
Issue
82

Citation

Baghdadi, D. , Scace, R. and Walters, E. (1989), Semiconductor Measurement Technology: Database for and Statistical Analysis of the Interlaboratory Determination of the Conversion Coefficient for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 30, 1989, Updated October 12, 2021