Baghdadi, D.
, Scace, R.
and Walters, E.
(1989),
Semiconductor Measurement Technology: Database for and Statistical Analysis of the Interlaboratory Determination of the Conversion Coefficient for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed April 23, 2024)
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Semiconductor Measurement Technology: Database for and Statistical Analysis of the Interlaboratory Determination of the Conversion Coefficient for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption
Published
Author(s)
D. Baghdadi, , E. J. Walters
Citation
Special Publication (NIST SP) -
Volume
400
Issue
82
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created June 30, 1989, Updated October 12, 2021