@misc{767261,
  author = {D. Baghdadi and Robert Scace and E. Walters},
  title = {Semiconductor Measurement Technology: Database for and Statistical Analysis of the Interlaboratory Determination of the Conversion Coefficient for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption},
  year = {1989},
  number = {400},
  month = {1989-07-01 00:07:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}