Albers, J.
and Berkowitz, H.
(1993),
Semiconductor Measurement Technology: A Collection of Computer Programs for Two-Probe Resistance (Spreading Resistance) and Four-Probe Resistance Calculations: RESPAC, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 10, 2026)
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Semiconductor Measurement Technology: A Collection of Computer Programs for Two-Probe Resistance (Spreading Resistance) and Four-Probe Resistance Calculations: RESPAC
Published
Author(s)
, H. L. Berkowitz
Citation
Special Publication (NIST SP) -
Volume
400
Issue
91
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created May 31, 1993, Updated October 12, 2021