@misc{776516,
  author = {John Albers and H. Berkowitz},
  title = {Semiconductor Measurement Technology: A Collection of Computer Programs for Two-Probe Resistance (Spreading Resistance) and Four-Probe Resistance Calculations: RESPAC},
  year = {1993},
  number = {400},
  month = {1993-06-01 00:06:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}