The ability to acquire quality equipment and process data is pertinent for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator is being developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator can also be used to explore methods to mitigate the latencies and provide guidance on time-stamping for equipment data acquisition systems.
Proceedings Title: ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication
Conference Dates: September 22-26, 2008
Conference Location: Ann Arbor, MI
Pub Type: Conferences
time synchronization, data acquisition, semiconductor manufacturing, data quality, Equipment Data Acquisition standard