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SEM Induced Shrinking of Solid State Nanopores for Single Molecule Detection

Published

Author(s)

Anmiv Prahbu, Kevin J. Freedman, Joseph W. Robertson, Zhorro Nikolov, John J. Kasianowicz, MinJun Kim

Abstract

We have investigated the shrinkage of solid state nanopores by a scanning electron microscope and find the process to be reproducible and dependant beam parameters such as the accelerating voltage and electron flux. The shrinking phenomenon does not involve simple electron beam induced deposition of hydrocarbon contaminants but is an energy dependant process that involves material flow along the surface of the nanopore membrane. Pores thus fabricated were then used to detect λ DNA.
Citation
Nano Letters
Volume
22

Keywords

nanopore, scanning electron microscopy, nanolithography, DNA, single molecule sensing

Citation

Prahbu, A. , Freedman, K. , Robertson, J. , Nikolov, Z. , Kasianowicz, J. and Kim, M. (2011), SEM Induced Shrinking of Solid State Nanopores for Single Molecule Detection, Nano Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907430 (Accessed April 20, 2024)
Created September 21, 2011, Updated October 12, 2021