U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications by:

Search Title, Abstract, Conference, Citation, Keyword or Author
Displaying 1 - 5 of 5

NIST Random Profile Roughness Specimens and Standard Bullets

January 1, 2000
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Robert A. Clary, Michael L. McGlauflin, Eric P. Whitenton, Christopher J. Evans
Based on the numerical controlled (NC) diamond turning process used previously for manufacturing random profile roughness specimens, two prototype standard bullets were developed at the National Institute of Standards and Technology (NIST). These standard

NIST Random Profile Roughness Specimens and Standard Bullets

January 1, 2000
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Christopher J. Evans, Michael L. McGlauflin, Eric P. Whitenton, Robert A. Clary
Based on the numerical controlled (NC) diamond turning process used previously for manufacturing random profile roughness specimens, two prototype standard bullets were developed at the National Institute of Standards and Technology (NIST). These standard

NIST Virtual/Physical Random Profile Roughness Calibration Standards

October 1, 1998
Author(s)
Jun-Feng Song, Christopher J. Evans, Michael L. McGlauflin, Eric P. Whitenton, Theodore V. Vorburger, Y B. Yuan
The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profiles

A Method to Characterize Overlay Tool Misalignments and Distortions

July 1, 1997
Author(s)
Richard M. Silver, James E. Potzick, Fredric Scire, Christopher J. Evans, Michael L. McGlauflin, Edward A. Kornegay, Robert D. Larrabee
A new optical alignment artifact under development at NIST is described. This structure, referred to as a stepped microcone, is designed to assist users and manufacturers of overlay metrology tools in the reduction of tool-induced measurement errors. We
Was this page helpful?