May 20, 2022
Author(s)
Tammy Lucas, John Biesecker, W.Bertrand (Randy) Doriese, Shannon Duff, Gene C. Hilton, Joel Ullom, Michael Vissers, Dan Schmidt
We describe our indium bump process for low-temperature detectors and associated readout. A titanium nitride under bump metallization layer (UBM) is reactively sputtered onto wiring pads as a diffusion barrier and adhesion layer. Indium is thermally