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Search Publications by: Russell E. Hajdaj (Fed)

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Displaying 1 - 3 of 3

Reference Metrology in a Research Fab: The NIST Clean Calibrations Thrust

April 12, 2009
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Joseph Fu, Thomas B. Renegar, Xiaoyu A. Zheng, Theodore V. Vorburger, Albert M. Hilton, Marc J. Cangemi, Lei Chen, Michael A. Hernandez, Russell E. Hajdaj, Michael R. Bishop, Aaron Cordes
In 2004, the National Institute of Standards and Technology (NIST) commissioned the Advanced Measurement Laboratory (AML) – a state-of-the-art, five-wing laboratory complex for leading edge NIST research. The NIST NanoFab – a 1765 m2 (19,000 ft2) clean

Reference Material 8091: New Scanning Electron Microscope Sharpness Standard

August 1, 2001
Author(s)
Andras Vladar, Michael T. Postek, Nien F. Zhang, Robert D. Larrabee, Samuel N. Jones, Russell E. Hajdaj
All scanning electron microscope-based inspection instruments, whether they are in a laboratory or on the production line, slowly lose their performance and then the instrument is no longer capable of providing as good quality, sharp images as before. This

Reference Material 8091: New Scanning Electron Microscope Sharpness Standard

August 1, 2001
Author(s)
Andras Vladar, Michael T. Postek, Nien F. Zhang, Robert D. Larrabee, Samuel N. Jones, Russell E. Hajdaj
Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted