June 1, 2012
Author(s)
John D. Wright, Thiago Cobu, Robert F. Berg, Michael R. Moldover
We calibrated three models of commercially-manufactured, laminar flow meters (LFMs) at four pressures (100 kPa, 200 kPa, 300 kPa, and 400 kPa) with five gases (N2, Ar, He, CO2, and SF6) over a 10:1 flow range using NISTs primary flow standards as