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Search Publications by: Thomas Brian Renegar (Fed)

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Displaying 76 - 87 of 87

A Simplified Realization for the Gaussian Filter in Surface Metrology

January 1, 2000
Author(s)
Y B. Yuan, Theodore V. Vorburger, Jun-Feng Song, Thomas B. Renegar
A simplified realization for the Gaussian filter in surface metrology is presented in this paper. The sampling function sinu/u is used for simplifying the Gaussian function. According to the central limit theorem, when n approaches infinity, the function

Experimental Test of Blind Tip Reconstruction for Scanning Probe Microscopy

January 1, 2000
Author(s)
Samuel Dongmo, John S. Villarrubia, Samuel N. Jones, Thomas B. Renegar, Michael T. Postek, Jun-Feng Song
Determination of the tip geometry is a prerequisite to converting the scanning probe microscope (SPM) from a simple imaging instrument to a tool that can perform width measurements accurately. Recently we developed blind reconstruction, a method to

Step Height Metrology for Data Storage Applications

November 1, 1999
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek
The measurements of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) are quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition

Step-height Metrology for Data Storage Applications

November 1, 1999
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek
The measurement of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) is quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition

Tip Characterization for Scanned Probe Microscope Width Metrology

March 1, 1998
Author(s)
Samuel Dongmo, John S. Villarrubia, Samuel N. Jones, Thomas B. Renegar, Michael T. Postek, Jun-Feng Song
Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of the

Stylus-Laser Surface Calibration System

October 1, 1996
Author(s)
Theodore V. Vorburger, Jun-Feng Song, T Giauque, Thomas Brian Renegar, Eric P. Whitenton, M Croarkin
A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser