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Search Publications by: Thomas A. Germer (Fed)

Displaying 326 - 350 of 385

Polarization of light scattered by microrough surfaces and subsurface defects

January 1, 1999

Author(s)

Thomas A. Germer, Clara C. Asmail

Polarization of Light Scattered by Particles on Silicon Wafers

January 1, 1999

Author(s)

Li Piin Sung, George W. Mulholland, Thomas Germer

Bidirectional ellipsometry has been developed as a technique for distinguishing among various scattering features near surfaces.Employi Employing incident light with fixed polarization, the technique measures the principal angle of polarization and the

Polarization of Light Scattered by Particles on Silicon Wafers, ed. by J.C. Stover

January 1, 1999

Author(s)

L Sung, G W. Mulholland, Thomas Germer

Polarization of Light Scattered by Spheres on Dielectric Layers on Silicon, ed by P.T. Chen Pages: Z.H. Gu, and A.A. Maradudin

January 1, 1999

Author(s)

L Sung, G W. Mulholland, Thomas Germer

Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt

January 1, 1999

Author(s)

Thomas A. Germer, L Sung

Polarized Light-Scattering Measurements of Dielectric Spheres upon a Silicon Surface

January 1, 1999

Author(s)

L Sung, G W. Mulholland, Thomas Germer

The Three Components of Reflection

October 1, 1998

Author(s)

Edward F. Kelley, George R. Jones Jr., Thomas Germer

Polarization of Out-of-Plane Optical Scatter From SiO 2 Films Grown on Photolithographically-Generated Microrough Silicon

July 1, 1998

Author(s)

Thomas A. Germer, B W. Scheer

Bi-directional ellipsometry results are presented for scatter from SiO 2 films grown on photolithographically produced microrough silicon surfaces. The principle direction of the polarization and the degree of linear polarization for scatter directions out

Display Reflectance Model Based on the BRDF

June 1, 1998

Author(s)

Edward F. Kelley, George R. Jones Jr., Thomas Germer

Many flat panel displays (FPDs) permit anti-reflection surface treatments that differ in character from those of traditional cathode-ray-tube displays. Specular reflection models (mirror-like, producing a distinct image) combined with diffuse (Lambertian)

Application of Bidirectional Ellipsometry to the Characterization of Roughness and Defects in Dielectric Layers

April 1, 1998

Author(s)

Thomas A. Germer

The polarization of light scattered into directions out of the plane of incidence is calculated for microroughness, defects, or particles in or near a dielectric film on a substrate. The theories for microroughness and Rayleigh scatter in the presence of

Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection

March 1, 1998

Author(s)

Thomas A. Germer

In this paper, I will discuss the theory and application of polarized light scatter. Recent measurements have shown that some sources of scatter, including microroughness and subsurface defects, have well-defined polarizations for any specific pair of

Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover

January 1, 1998

Author(s)

Thomas A. Germer

Display Reflectance Model Based on the BRDF

January 1, 1998

Author(s)

Edward F. Kelley, G R. Jones, Thomas Germer