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Search Publications by Christopher W. Meyer

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Displaying 26 - 48 of 48

Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools

Author(s)
Kenneth G. Kreider, David W. Allen, D H. Chen, D P. DeWitt, Christopher W. Meyer, Benjamin K. Tsai
We investigated the effect of different wafer emissivities and the effect of low emissivity films on RTP wafer temperature measurements using light pipe

Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools

Author(s)
Kenneth G. Kreider, David W. Allen, D H. Chen, D P. DeWitt, Christopher W. Meyer, Benjamin K. Tsai
We investigated the effect of different wafer emissivities and the effect of low emissivity films on rapid thermal processing (RTP) wafer temperature

The Kelvin and Temperature Measurements

Author(s)
Billy W. Mangum, G T. Furukawa, Kenneth G. Kreider, Christopher W. Meyer, Dean C. Ripple, Gregory F. Strouse, Weston L. Tew, Robert D. Saunders, Bettye C. Johnson, Howard W. Yoon, Michael R. Moldover, Charles E. Gibson
The International Temperature Scale of 1990 (ITS90) is defined from 0.65 K upwards to the highest temperature measurable by spectral radiation thermometry, the

Non-Uniquenes of the ITS-90 From 13.8033 K to 24.5561 K

Author(s)
Christopher W. Meyer, Gregory F. Strouse, Weston L. Tew
The International Temperature Scale of 1990 (ITS-90) is defined in the region 3.0 K to 24.5561 K by an interpolating constant volume gas thermometer (ICVGT)

Primary Acoustic Thermometry From 217 K to 303 K

Author(s)
Michael R. Moldover, S J. Boyes, A R. Goodwin, Christopher W. Meyer
We report new values for the difference (T T90) between Kelvin thermodynamic temperatures T and ITS-90, the International Temperature Scale of 1990. The new