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Search Publications

NIST Authors in Bold

Displaying 476 - 500 of 930

Through-focus scanning optical microscopy for defect inspection of EUV masks

August 12, 2013
Author(s)
Ravikiran Attota, Vibhu Jindal
The TSOM method provides three-dimensional nanoscale metrology using a conventional optical microscope. Substantial improvements in defect detectability using the TSOM method will be presented. The TSOM method shows potential to (i) detect phase defects on

Production and Applications of Cellulose Nanomaterials

August 1, 2013
Author(s)
Michael T. Postek, Robert J. Moon, Alan Rudie, Michael Bilodeau
“Production and Applications of Cellulosic Nanomaterials” was intended to help organize and highlight the wide range of research being conducted worldwide on the science and technology of cellulose nanomaterials. The format of this book consists of short

Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection

June 24, 2013
Author(s)
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo
Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.

Dimensional Metrology and Imaging of Cellulose Nanocrystals

June 14, 2013
Author(s)
Michael T. Postek, Andras Vladar
Cellulose nanocrystals are one group of nanoparticles that have high potential economic value but, also present many basic research and manufacturing challenges. These challenges are not only in development of the fundamental processes needed for the

Sensitivity of gold nano conductors to common contaminations ab initio results

May 29, 2013
Author(s)
Shmuel Barzilai, Francesca M. Tavazza, Lyle E. Levine
Gold nanowire chains are considered a good candidate for nanoelectronic devices because they exhibit remarkable structural and electrical properties. A previous study shows that the beryllium terminated BeO (0001) surface may be a useful platform for

Nanoparticles in Flame-Retardant Coatings for Flexible Polyurethane Foams: Effects on Flammability and Nanoparticle Release

May 15, 2013
Author(s)
Mauro Zammarano, Rick D. Davis, Yeon S. Kim, Richard H. Harris Jr., Marc R. Nyden, Jeffrey W. Gilman, Nasir M. Uddin
Nanoparticles can effectively reduce polymer flammability; however, the impact of nanoparticles on environmental and health safety is still unclear. The purpose of this study is twofold: (1) to develop and investigate the effect of nanoparticle-rich

Surface Chemical Transformations of UV irradiated Silica-Epoxy Nanocomposites

May 15, 2013
Author(s)
Justin M. Gorham, Tinh Nguyen, Deborah S. Jacobs, Coralie Bernard, Richard D. Holbrook
Silica nanoparticles (SiNPs) incorporated into a polymeric matrix, or silica nanocomposites (SiNCs), are used in a wide variety of commercially available products in numerous natural and artificial environments. Environmental factors, such as light, may

Tools and Approaches for the Assessment of Nanomaterial Induced Oxidative DNA Damage

May 13, 2013
Author(s)
Elijah J. Petersen, Bryce Marquis, Pawel Jaruga, M Miral Dizdar, Bryant C. Nelson
Hyphenated mass spectrometry techniques have been employed as one of the primary analytical tools for investigating the effects of ionizing radiation, chemical/biological carcinogens, and oxygen derived free radicals on the induction and subsequent repair

Nanosilver suppresses growth and induces oxidative damage to DNA in Caenorhabditis elegans

May 2, 2013
Author(s)
Bryant C. Nelson, Bryce J. Marquis, Piper R. Hunt, Katherine M. Tyner, Sean Conklin, Nicholas Olejnik, Robert L. Sprando
The utility of C. elegans as an alternative model to assess nanomaterial toxicity was evaluated using 10 nm silver particles (10nmAg). Endpoints of nanomaterial uptake and localization, larval growth, morphology, and DNA damage were assessed. Orally

Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism

April 30, 2013
Author(s)
Mohammad Olfatnia, Siddharth Sood, Jason J. Gorman, Shorya Awtar
This paper reports in-plane electrostatic combdrive actuators with stroke as large as 245 μm that is achieved by employing a novel Clamped Paired Double Parallelogram (C-DPDP) flexure mechanism. The C-DP-DP flexure mechanism design offers high bearing

TSV Reveal height and bump dimension metrology by the TSOM method

April 30, 2013
Author(s)
Ravikiran Attota, Haesung Park, Victor H. Vartanian, Ndubuisi G. Orji, Richard A. Allen
Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement method

Use of TSOM for sub-11 nm node pattern defect detection and HAR features

April 30, 2013
Author(s)
Ravikiran Attota, Abraham Arceo, Bunday Benjamin
In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely be

Macroscale refrigeration by nanoscale electron transport

February 26, 2013
Author(s)
Peter J. Lowell, Galen C. O'Neil, Jason M. Underwood, Joel N. Ullom
Nano- and Micro- Electromechanical devices (NEMS & MEMS) have become ubiquitous; examples include automobile accelerometers, inkjet printer heads, infrared viewers, and mirrors for image manipulation and projection. Applications fall broadly in the

Stable Field Emission from Nanoporous Silicon Carbide

February 15, 2013
Author(s)
Myung Gyu Kang, Henri Lezec, Fred Sharifi
A new method for fabrication of high current density field emitters based on nanoporous silicon carbide is presented. The emitters are monolithic structures which do not require high temperature gas phase synthesis and the process is compatible with
Displaying 476 - 500 of 930
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