March 1, 2002
Author(s)
Richard A. Allen, Michael W. Cresswell, William F. Guthrie, Loren W. Linholm, H Bogardus, J V. Martinez de pinillos, B A. Am ende, Christine E. Murabito, M H. Bennett
Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in (110) silicon-on-insulator films. The sidewalls of the reference features are parallel, normal to the substrate surface, and have almost