In Search of the Key to the Lock: Clock Synchronization Issues and Requirements in Semiconductor Manufacturing
Ya-Shian Li-Baboud, John V. Messina
Precision time synchronization requirements lie on the horizon for the semiconductor manufacturing industry. The industry has several potential applications that will require a common time base including the capability to rapidly merge semiconductor factory and process data from heterogeneous sources for providing intelligent data analysis in process control and equipment diagnostics. This paper will discuss the potential semiconductor applications for time synchronization and specific industry issues and requirements of semiconductor manufacturing. How IEEE 1588 potentially applies in the industry's solution scheme and some possible hindrances to its adoption are also investigated in this paper.
Proceedings of the 2005 IEEE-1588 Conference
October 9-12, 2005
Winterthur, 1, SZ
Advanced Process Control, Clock Synchronization, IEEE 1588, Semiconductor Manufacturing
and Messina, J.
In Search of the Key to the Lock: Clock Synchronization Issues and Requirements in Semiconductor Manufacturing, Proceedings of the 2005 IEEE-1588 Conference, Winterthur, 1, SZ
(Accessed February 21, 2024)