@conference{773451, author = {Ya-Shian Li-Baboud and John Messina}, title = {In Search of the Key to the Lock: Clock Synchronization Issues and Requirements in Semiconductor Manufacturing}, year = {2005}, month = {2005-10-17 00:10:00}, publisher = {Proceedings of the 2005 IEEE-1588 Conference, Winterthur, 1, SZ}, language = {en}, }