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Scattering of Cl2 beams from Si(100) for kinetic energies up to 2.6 eV: Implications for sticking coefficients and reaction product formation

Published

Author(s)

G C. Weaver, S R. Leone
Citation
Surface Science
Volume
328

Citation

Weaver, G. and Leone, S. (1995), Scattering of Cl<sub>2</sub> beams from Si(100) for kinetic energies up to 2.6 eV: Implications for sticking coefficients and reaction product formation, Surface Science (Accessed April 17, 2024)
Created December 31, 1994, Updated October 12, 2021