TY - JOUR AU - G Weaver AU - S Leone C2 - Surface Science DA - 1995-01-01 00:01:00 LA - en M1 - 328 PB - Surface Science PY - 1995 TI - Scattering of Cl2 beams from Si(100) for kinetic energies up to 2.6 eV: Implications for sticking coefficients and reaction product formation ER -