Nikoobakht, B.
(2008),
A Scalable Platform for Integrating Horizontal Nanochannels with Known Registries to Microchannels, Chemistry of Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832292
(Accessed October 8, 2025)
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A Scalable Platform for Integrating Horizontal Nanochannels with Known Registries to Microchannels
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Abstract
A new method for in-situ fabrication of nanochannels is developed which allows adjusting their average pore size to an unprecedented range of 5 nm to 20 nm. It is shown that nanochannels with different but controlled pore sizes are selectively fabricated at known positions on the same surface. Equally important, nanochannels, either single or group, are addressable photolithographically and integrable to microchannels without the use of any high resolution lithography. Formation of nanochannels is examined by cross-sectional electron microscopy and energy-dispersive X-ray spectroscopy. This technique uses horizontal ZnO nanowires as template and provides the capability of parallel fabrication of nanofluidic platforms.Citation
Chemistry of Materials
Volume
21
Issue
1
Pub Type
Journals
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Keywords
Nanochannel, Focused ion beam, nanowire, oriented assembly, Scalable fabrication
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Created December 8, 2008, Updated February 19, 2017