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Round Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS

Published

Author(s)

David S. Simons, Richard M. Lindstrom
Citation
Applied Surface Science
Volume
252
Issue
19

Keywords

aresenic, INAA, LEXES, matrix normalization, SIMS

Citation

Simons, D. and Lindstrom, R. (2006), Round Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS, Applied Surface Science (Accessed April 20, 2024)
Created July 30, 2006, Updated February 19, 2017