Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Room-temperature-deposited dielectrics and superconductors for integrated photonics



Jeffrey M. Shainline, Sonia M. Buckley, Nima Nader, Cale M. Gentry, Kevin C. Cossel, Milos A. Popovic, Nathan R. Newbury, Richard P. Mirin


We present an approach to fabrication and packaging of integrated photonic devices that utilizes waveguide and detector layers deposited at near-ambient temperature. All lithography is performed with a 365 nm i-line stepper, facilitating low cost and high scalability. We have shown low-loss SiN waveguides, high-Q ring resonators, critically coupled ring resonators, 50/50 beam splitters, Mach-Zehnder interferometers (MZIs) and a process-agnostic fiber packaging scheme. We have further explored the utility of this process for applications in nonlinear optics and quantum photonics. We demonstrate spectral tailoring and octave-spanning supercontinuum generation as well as the integration of superconducting nanowire single photon detectors with MZIs and channel-dropping filters. The packaging approach is suitable for operation up to 160 \degree C as well as below 1 K. The process is well suited for augmentation of existing foundry capabilities or as a stand-alone process.
Applied Physics Letters


Integrated photonics, single-photon detectors, waveguides, resonators, spectroscopy, nonlinear optics


Shainline, J. , Buckley, S. , Nader, N. , Gentry, C. , Cossel, K. , Popovic, M. , Newbury, N. and Mirin, R. (2017), Room-temperature-deposited dielectrics and superconductors for integrated photonics, Applied Physics Letters, [online], (Accessed June 18, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created May 1, 2017, Updated November 10, 2018