@article{234371, author = {Jeffrey Shainline and Sonia Buckley and Nima Nader and Cale Gentry and Kevin Cossel and Milos Popovic and Nathan Newbury and Richard Mirin}, title = {Room-temperature-deposited dielectrics and superconductors for integrated photonics}, year = {2017}, number = {25}, month = {2017-05-01}, publisher = {Applied Physics Letters}, doi = {https://doi.org/10.1364/OE.25.010322}, language = {en}, }