Report of Investigation: Reference Material 8090 - SEM Magnification Calibration Reference Material

Published

August 9, 1995

Author(s)

Michael T. Postek, R Gettings

Abstract

Reference Material (RM) 8090 is intended primarily for use in calibrating the magnification scale of a scanning electron microscope (SEM) over a wide range of magnifications, from less than 100X to greater than 300,000X. RM 8090 contains structures in both X and Y dimensions, ranging in nominal pitch from 0.2 ?m to 3000 ?m and is useful at both high and low accelerating voltages. RM 8090 is the thickness of a silicon wafer and thus, can be inserted in the modern automated measurement systems. Most laboratory SEMs and many dedicated in-line metrology SEM-based instruments require several calibration structures to cover the full range of magnification. This standard is specifically designed to meet that need. RM 8090 is an advance issue of SRM 2090 intended to satisfy industry need during the final phases of the SRM 2090 development cycle. SRM 2090 will be fully characterized and certified according to NIST procedures.

Citation

Report of Investigation

Pub Type

Others

Keywords

artifact, calibration, magnification, SEM, standard reference material

Citation

Postek, M. and Gettings, R. (1995), Report of Investigation: Reference Material 8090 - SEM Magnification Calibration Reference Material, Report of Investigation (Accessed April 20, 2024)