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Relaxation behavior of polymer structures fabricated by nanoimprint lithography
Published
Author(s)
Y R. Ding, Thomas Germer, J F. Douglas, B Okerberg, A E. Karim, C L. Soles
Citation
ACS Nano
Volume
1
Issue
2
Pub Type
Journals
Citation
Ding, Y.
, Germer, T.
, Douglas, J.
, Okerberg, B.
, Karim, A.
and Soles, C.
(2007),
Relaxation behavior of polymer structures fabricated by nanoimprint lithography, ACS Nano
(Accessed June 9, 2023)