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The Relationship Between Accelerating Voltage and Electron Detection Modes to Linewidth Measurement in an SEM

Published

Author(s)

Michael T. Postek, William J. Keery, Robert D. Larrabee
Citation
Journal of Scanning Microscopy
Volume
10

Citation

Postek, M. , Keery, W. and Larrabee, R. (1988), The Relationship Between Accelerating Voltage and Electron Detection Modes to Linewidth Measurement in an SEM, Journal of Scanning Microscopy (Accessed April 16, 2024)
Created December 30, 1988, Updated October 12, 2021