@article{768206,
  author = {Michael Postek and William Keery and Robert Larrabee},
  title = {The Relationship Between Accelerating Voltage and Electron Detection Modes to Linewidth Measurement in an SEM},
  year = {1988},
  number = {10},
  month = {1988-12-31 00:12:00},
  publisher = {Journal of Scanning Microscopy},
  language = {en},
}