Zavada, J.
, Wilson, R.
and Comas, J.
(1989),
Redistribution of H and Be in GaAs/AlAs Multilayer Structures with Post-Implantation Annealing, Journal of Applied Physics
(Accessed July 27, 2024)
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Redistribution of H and Be in GaAs/AlAs Multilayer Structures with Post-Implantation Annealing
Published
Author(s)
J. M. Zavada, R. G. Wilson, J. Comas
Citation
Journal of Applied Physics
Volume
65
Issue
5
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 28, 1989, Updated October 12, 2021