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Redistribution of H and Be in GaAs/AlAs Multilayer Structures with Post-Implantation Annealing

Published

Author(s)

J. M. Zavada, R. G. Wilson, J. Comas
Citation
Journal of Applied Physics
Volume
65
Issue
5

Citation

Zavada, J. , Wilson, R. and Comas, J. (1989), Redistribution of H and Be in GaAs/AlAs Multilayer Structures with Post-Implantation Annealing, Journal of Applied Physics (Accessed April 18, 2024)
Created February 28, 1989, Updated October 12, 2021